product Information

CHROME MASK

What is a chrome mask?

chrome mask

The core of photo masks meeting for high-precision pattern.By selecting quartz glass as substrate, it is possible to stabilize the dimensions under the temperature changes during exposure.Corresponds to the minimum pattern width of 2μm.

Applications

MEMS、FPD(LCD/OLED)、WLP、Thin fime chip products etc.

Features

  • No fringe, suitable for ultra high-resolution image-formation.
  • By selecting quartz glass as substrate, it is possible to stabilize the dimensions under the temperature changes during exposure.
  • Excellent transcription performance with its thin light-shielding film.
  • Corresponds to the minimum pattern width of 2μm.

Application data format

Gerber(274D/274X) / DWG / DXF / GDS2/ODB++
*Highly sensitive data communication method is available, please contact us.

Options

  • AP Coating (releasability of chromium surface added)
  • Mask corresponding to electricity destruction
Substrate Soda lime glass,Quartz glass
Size 76.2x76.2mm~508.8x609.6mm
Substrate thickness 1.0mm~5.0mm
Emulsion Low-Reflection Bilayer Chromium,Monolayer Chromium,Three Layer Chromium
Emulsion thickness 90~110nm
Minimum line width 2μm
Short dimension accuracy ±0.2μm~
Long dimension accuracy ±0.5μm~
Temperature variation rate 0.00085%(Soda lime glass)
0.00006%(Quartz glass)
Humidity variation rate None
*Please contact us, if otherwise needed.
Inquiries and Information Request

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