CHROME MASK
What is a chrome mask?

The core of photo masks meeting for high-precision pattern.By selecting quartz glass as substrate, it is possible to stabilize the dimensions under the temperature changes during exposure.Corresponds to the minimum pattern width of 2μm.
Applications
MEMS、FPD(LCD/OLED)、WLP、Thin fime chip products etc.
Features
- No fringe, suitable for ultra high-resolution image-formation.
- By selecting quartz glass as substrate, it is possible to stabilize the dimensions under the temperature changes during exposure.
- Excellent transcription performance with its thin light-shielding film.
- Corresponds to the minimum pattern width of 1μm.
Application data format
Gerber(274D/274X) / DWG / DXF / GDS2/ODB++
*Highly sensitive data communication method is available, please contact us.
Options
- AP Coating (releasability of chromium surface added)
- Mask corresponding to electricity destruction
Substrate | Soda lime glass,Quartz glass |
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Size | ~700x800mm |
Substrate thickness | 1.0mm~5.0mm |
Emulsion | Low-Reflection Bilayer Chromium,Monolayer Chromium,Three Layer Chromium |
Emulsion thickness | 100~125nm |
Minimum line width | 1μm~ |
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Short dimension accuracy | ±0.1μm~ |
Long dimension accuracy | ±0.5μm~ |
Temperature variation rate | 0.00085%(Soda lime glass) 0.00006%(Quartz glass) |
Humidity variation rate | None |
*Please contact us, if otherwise needed.